Imec Successfully Demonstrates High-NA Lithography for Logic and DRAM Patterning for First Time
Imec and ASML have announced that the two companies have printed the first logic and DRAM patterns using ASML’s experimental Twinscan EXE:5000 EUV lithography tool, the industry’s first High-NA EUV scanner. The lithography system achieved resolution that is good enough for 1.4nm-class process technology with just one exposure, which confirms the capabilities of the system…










