Russia Invests in Home Grown X-Ray Lithography Tech
The Russian government will provide 670 million rubles ($8.5 million) to facilitate research into X-ray lithography, reports Zelenograd. Moscow’s Institute of Electronic Technology (MIET) will use these funds, from the Ministry of Trade and Industry, and push forward with its plans to develop a maskless lithographic machine based on an X-ray synchrotron and/or plasma source.…
