Microwave annealing for 2nm semiconductor materials

Modified Household Microwave Oven Overcomes 2nm Semiconductor Hurdle

Scientists at Cornell University have been using a modified household microwave oven to help overcome a significant obstacle to practical 2nm semiconductor production. The resulting microwave annealer borrows inspiration from TSMC’s theories about microwaves and silicon doping with phosphorus. As a result, semiconductor manufacturers could push past a previous phosphorus concentration limit using the newly…